Russia's ZNTC Completes Third R&D Stage of 130nm Lithography Tool
Zelenograd Nanotechnology Center finished R&D on its first 130nm lithography system for 200-mm wafers, now undergoing internal testing in Russia.
Zelenograd Nanotechnology Center (ZNTC) has completed the third research and development stage of its first lithography tool capable of processing 200-mm wafers using a 130nm process technology, according to tomshardware.com. The system is now undergoing internal engineering and acceptance testing.
Belarus-based Planar developed the lithography system and manufactured its mechanical assemblies and components, according to documents seen by CNews. The lasers for the unit were developed by Lassard.
Russia's Ministry of Industry and Trade allocated approximately $70 million for the development program. A single ZNTC stepper is estimated to cost $6.7 million, with its laser light source around $600,000, totaling about $7.3 million.
Earlier 130nm Context
Intel and AMD adopted 130nm manufacturing processes in 2001 and 2002, respectively. ASML's PAS 5500/150 stepper had a list price of $3.1 million when launched in the first quarter of 2001, equivalent to around $5.8 million in 2026 dollars. Russian chipmakers have historically developed two 130nm-class nodes relying on lithography equipment from ASML.
Quick answers
What is the ZNTC lithography tool capable of?
It can process 200-mm wafers using a 130nm process technology.
How much did Russia's Ministry of Industry and Trade allocate for the development program?
Approximately $70 million was allocated for the development program.
How much does a single ZNTC stepper cost?
A single ZNTC stepper is estimated to cost $6.7 million, with its laser light source around $600,000, totaling about $7.3 million.